The micro linear rotary actuator (LPR) is a high-precision, powerful actuator designed to combine linear and rotary motions. It is particularly suitable for industries with increasing demands for miniaturization. As devices continue to shrink, the LPR actuator plays a crucial role in the precise installation and assembly of chips.
Linear motion width: only 12mm, Combined linear and rotary width: as small as 13mm, Ideal for multi-axis parallel use in space-constrained environments.
Built-in high-resolution optical scale (0.5μm)
Rotary encoder (20-bit) for fast and accurate motion control
Minimum pressing force: 20g ± 5g. Models with built-in force sensors can achieve 5g ± 1.5g
Suitable for handling delicate and fragile components
Supports soft landing technology. Paired with Delta drivers to ensure stable press-fit quality and improve yield rates
Easy installation without additional R&D resources, reducing development costs
No-load acceleration exceeds 6g
Performance surpasses traditional motor + screw systems or cylinder technologies
In semiconductor processes, wafer handling and packaging demand high precision and speed. The LPL series micro linear rotary actuators deliver excellent performance in wafer transfer and packaging processes through their high speed, precision, and delicate force control technology.
Position Mode: High-Speed Descent
The device moves quickly from the initial position (Point A) toward the target position (Point B).
Velocity Mode: Low-Speed Descent into Soft Landing
As it nears the target point, the speed decreases to make gentle contact with the target, minimizing impact. This process, known as Soft Landing, protects fragile components and improves yield.
Torque Mode: Maintain Stable Pressure
Upon reaching the target position (Point C), the device switches to torque mode to apply a stable preset pressure, ensuring press-fit quality.
Position Mode: Rapid Retract
After press-fitting, the device quickly returns to the initial position, ready for the next cycle.
