AKribis
XYT Wafer Testing Platform
- XYT Wafer Testing Platform features a XY hollow design with a Class 100
- XY cross-overlay structure, incorporating linear motors and high-precision crossed roller guide rails internally.
- The XY system integrates high-precision grating rulers, achieving a repeatability positioning accuracy of ±0.5um and an absolute positioning accuracy of 2um.
- The T-axis is equipped with a high-precision torque motor, with axial/radial endplay less than 3um, allowing for a 360-degree rotation.